Travel Range Increased to 150 mm on a Stage

Stages Compression/Tension & Shear Torsion

Travel Range 50, 100, 150, 200 or 250 mm 360° continuous

Resolution 0.5 or 0.1 um (high accuracy) 0.0005°

Maximum Velocity 100 mm/s 80°/s

Maximum Acceleration 500 mm/s² 320°/s²